@phdthesis{3572, author = {Bosheng Zhang}, title = {EUV Microscopy with a Tabletop High Harmonic Generation Source: Generalizing Coherent Di ractive Imaging to Extended Samples in Transmission, Reflection, and Hyperspectral Modalities}, abstract = {

Imaging at the nanoscale is of great interest for applications in materials science, nanoscience\ and biology. The microscopy method developed in this thesis combines a tabletop coherent EUV/Xray\ source based on high harmonic generation, and an image-forming method based on coherent\ diffractive imaging. This microscopy method offers truly diffraction-limited resolution; however,\ previous work has been limited to thin, isolated samples in transmission mode. This thesis work\ extends this tool for imaging non-isolated samples, and for working in reflection mode to image\ surface features of thick samples. The quantitative phase information of the reflection image enables\ surface prolometry capability with sub-nanometer precision. The microscope developed in this\ work is also demonstrated to have hyperspectral capability with simultaneous multi-wavelength\ illumination, without the need for wavelength scanning or energy-resolved detectors. In the future,\ by taking advantage of the short-pulse nature of the high harmonic illumination, this microscope will\ be able to image nanoscale ultrafast dynamics with 10 femtosecond temporal resolution, openingthe door for imaging at the space-time limits.

}, year = {2015}, volume = {Ph.D.}, pages = {119}, month = {2015-02}, publisher = {University of Colorado Boulder}, address = {Boulder}, }