@inbook{8055, author = {Alan Gallagher}, title = {Metal vapor excimers}, year = {1984}, volume = {30}, number = {Topics in Applied Physics}, pages = {139-179}, publisher = {Springer Berlin Heidelberg}, address = {Berlin, Heidelberg}, issn = {0303-4216}, isbn = {978-3-540-13013-0 Online ISBN 978-3-540-35671-4}, doi = {10.1007/3540130136_21}, }