TY - JOUR AU - Nathan Brooks AU - B. Wang AU - I. Binnie AU - M. Tanksalvala AU - Y. Esashi AU - J. Knobloch AU - Q. Nguyen AU - B. McBennett AU - N. Jacobs AU - G. Gui AU - Z. Zhang AU - Henry Kapteyn AU - Margaret Murnane AU - C. Bevis AB -

We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency.

BT - Optics Express DO - http://doi.org/10.1364/OE.458955 N2 -

We demonstrate temporally multiplexed multibeam ptychography implemented for the first time in the EUV, by using a high harmonic based light source. This allows for simultaneous imaging of different sample areas, or of the same area at different times or incidence angles. Furthermore, we show that this technique is compatible with wavelength multiplexing for multibeam spectroscopic imaging, taking full advantage of the temporal and spectral characteristics of high harmonic light sources. This technique enables increased data throughput using a simple experimental implementation and with high photon efficiency.

PY - 2022 T2 - Optics Express TI - Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source, ER -