FacebookTwitterInstagramYouTube RSS Feed

Comparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking

TitleComparison of electron cyclotron resonance and radio-frequency inductively coupled plasmas of Ar and N2: Neutral kinetic energies and source gas cracking
Publication TypeJournal Article
Year of Publication1998
AuthorsMaterer, N, Goodman, RS, Leone, SR
JournalJournal of Applied Physics
Volume83
Issue4
Pagination1917
Date PublishedJan-01-1998
ISSN00218979
DOI10.1063/1.366916
Short TitleJ. Appl. Phys.