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Direct detection of atomic arsenic desorption from Si(100)

TitleDirect detection of atomic arsenic desorption from Si(100)
Publication TypeJournal Article
Year of Publication1993
AuthorsAlstrin, AL, Strupp, PG, Leone, SR
JournalApplied Physics Letters
Volume63
Issue6
Pagination815
Date PublishedJan-01-1993
ISSN00036951
DOI10.1063/1.109917
Short TitleAppl. Phys. Lett.