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Surface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates

TitleSurface roughening during plasma-enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates
Publication TypeJournal Article
Year of Publication1997
AuthorsTanenbaum, DM, Laracuente, AL, Gallagher, AC
JournalPhysical Review B
Volume56
Issue7
Pagination4243 - 4250
Date PublishedJan-08-1997
ISSN0163-1829
DOI10.1103/PhysRevB.56.4243
Short TitlePhys. Rev. B