Metal vapor excimers

Author
Year of Publication
1984
Volume
30
Series Volume
Topics in Applied Physics
Start Page or ID
139-179
Publisher
Springer Berlin Heidelberg
City
Berlin, Heidelberg
ISSN Number
0303-4216
ISBN Number
978-3-540-13013-0 Online ISBN 978-3-540-35671-4
DOI
10.1007/3540130136_21
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